MEMS Research Lab@ Cleveland State University
 
RESEARCH






 

Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most popular silicon based sensors. Microaccelerometers alone are the second largest sold silicon based sensors after pressure sensors. However, MEMS gyroscope sensors cannot achieve such high sales volumes due to their high cost.

Knowing that the main challenge of the MEMS gyroscope industry has been achieving high-performance at low-cost solutions, MEMS research Lab at Cleveland State University is employing advanced control technology to develop sensors that would meet industries cost target while maintaining
high-performance.

MEMS Research Lab is the first lab that successfully designed and implemented an advanced control system, using both analog and digital circuitry, to control and approximate rotation rate of Vibrating Beam Gyroscope.

 

PUBLICATIONS PICTURES

 

MEMS Research Lab
Fenn College of Engineering
Cleveland State University
Cleveland Ohio
 

Cleveland State University / 2121Euclid Avenue, Cleveland, OH 44115-2214 / 216.687.2000