Micromachined inertial sensors, consisting of accelerometers and
gyroscopes, are one of the most popular silicon based sensors. Microaccelerometers alone are the second largest sold silicon based sensors after
pressure sensors. However, MEMS gyroscope sensors cannot achieve such high sales volumes due to their high cost.
Knowing that the main challenge of
the MEMS gyroscope industry has been achieving high-performance at
low-cost solutions, MEMS research Lab at Cleveland State University
is employing advanced control technology to develop sensors that
would meet industries cost target while maintaining
MEMS Research Lab is the first lab that successfully designed and implemented an advanced
control system, using both analog and digital circuitry, to control and approximate rotation rate of Vibrating Beam Gyroscope.